167071 -OEChem-02060822392D 5 4 0 0 0 0 0 0 0999 V2000 0.0000 -0.0034 0.0000 Si 0 0 0 0 0 0 0 0 0 0 0 0 0.0000 -1.5310 0.0000 F 0 0 0 0 0 0 0 0 0 0 0 0 -1.5552 -0.0069 0.0000 F 0 0 0 0 0 0 0 0 0 0 0 0 1.5517 0.0103 0.0000 F 0 0 0 0 0 0 0 0 0 0 0 0 0.0000 1.5310 0.0000 F 0 0 0 0 0 0 0 0 0 0 0 0 1 2 1 0 0 0 0 1 3 1 0 0 0 0 1 4 1 0 0 0 0 1 5 1 0 0 0 0 M END > 0 > 0 > 167071 > 3 > ChemIDplus > 007783611 > 7783-61-1 EINECS 232-015-5 HSDB 684 Perfluorosilane SILICON TETRAFLUORIDE Silane, tetrafluoro- Silicon fluoride Silicon fluoride (SiF4) Silicon tetrafluoride, compressed [UN1859] [Poison gas] Tetrafluorosilane UN1859 > 7783-61-1 > 007783611 > http://chem.sis.nlm.nih.gov/chemidplus/ > http://chem.sis.nlm.nih.gov/chemidplus/direct.jsp?result=advanced®no=007783611 > 24556 1 $$$$