27607-77-8 88188-06-1 EINECS 248-565-4 Methanesulfonic acid, trifluoro-, trimethylsilyl ester Trimethylsilyl triflate Trimethylsilyl trifluoromethanesulfonate Trimethylsilyl trifluoromethanesulphonate Trimethylsilyl trifluoromethylsulfonate