1009-93-4 2,2,4,4,6,6-Hexamethylcyclotrisilazane 4-04-00-04114 (Beilstein Handbook Reference) BRN 0774739 Cyclotrisilazane, 2,2,4,4,6,6-hexamethyl- Dimethylsilazane trimer EINECS 213-773-6 Hexamethylcyclotrisilazane NSC 139842