1,1,1-Trimethyl-N,N-bis(trimethylsilyl)silylamine 1586-73-8 AI3-63071 Amine, tris(trimethylsilyl)- EINECS 216-445-0 NSC 252162 Nonamethyltrisilazane Silanamine, 1,1,1-trimethyl-N,N-bis(trimethylsilyl)- Tris(trimethylsilyl)amine