2622-07-3 4-04-00-00426 (Beilstein Handbook Reference) AI3-50917 BRN 1073869 HEPA Hexaethylphosphoramide Hexaethylphosphoric triamide Hexaethylphosphorotriamide Hexaethylphosphorylamide Phosphoric triamide, hexaethyl- Tris(diethylamino)phosphine oxide