1,1,1,3,3,3-Hexamethyldisilazane 999-97-3 Bis(trimethylsilyl)amine Disilazane, 1,1,1,3,3,3-hexamethyl- HMDS Hexamethyldisilazane Hexamethylsilazane NSC93895 Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)- WLN: 1-SI-1&1&M-SI-1&1&1