680-31-9 InChI=1/C6H18N3OP/c1-7(2)11(10,8(3)4)9(5)6/h1-6H N,N,N',N',N'',N''-hexamethylphosphoric triamide hexamethylphophoric triamide hexamethylphosphoramide phosphoric triamide, N,N,N',N',N'',N''-hexamethyl-