1608-26-0 InChI=1/C6H18N3P/c1-7(2)10(8(3)4)9(5)6/h1-6H N,N,N',N',N'',N''-hexamethylphosphorous triamide hexamethylphosphorous triamide phosphorous triamide, N,N,N',N',N'',N''-hexamethyl-