1,1,3,3-tetramethyldisiloxane 3277-26-7 DISILOXANE,1,3-DIHYDRO,TETRAMETHYL InChI=1/C4H14OSi2/c1-6(2)5-7(3)4/h6-7H,1-4H disiloxane, 1,1,3,3-tetramethyl-