1,1,1-trimethyl-N-(trimethylsilyl)silanamine 999-97-3 DISILAZANE,HEXAMETHYL InChI=1/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-