2(3H)-benzoxazolone, 3-(trimethylsilyl)- 3-(trimethylsilyl)-1,3-benzoxazol-2(3H)-one InChI=1/C10H13NO2Si/c1-14(2,3)11-8-6-4-5-7-9(8)13-10(11)12/h4-7H,1-3H