1-Oxa-2,5-disilacyclopentane, 2,2,5,5-tetramethyl- 2,2,5,5-Tetramethyl-1-oxa-2,5-disilacyclopentane 2,2,5,5-Tetramethyl-2,5-disilafuran 7418-20-4 EINECS 231-037-2