659766 -OEChem-02060822452D 2 1 0 0 0 0 0 0 0999 V2000 5.0000 5.0000 0.0000 Ta 0 0 0 0 0 0 0 0 0 0 0 0 5.8250 5.0000 0.0000 N 0 0 0 0 0 0 0 0 0 0 0 0 1 2 3 0 0 0 0 M END > 0 > 0 > 659766 > 3 > ChemIDplus > 012033624 > 11116-09-9 12033-62-4 EINECS 234-788-4 Tantalum mononitride Tantalum nitride (TaN) > 11116-09-9 12033-62-4 > 012033624 > http://chem.sis.nlm.nih.gov/chemidplus/ > http://chem.sis.nlm.nih.gov/chemidplus/direct.jsp?result=advanced®no=012033624 > 82832 1 $$$$