1,1,3,3-Tetramethyldisilazane 15933-59-2 Disilazane, 1,1,3,3-tetramethyl- EINECS 240-072-2 N-(Dimethylsilyl)-1,1-dimethylsilylamine NSC 139849 Silanamine, N-(dimethylsilyl)-1,1-dimethyl- Tetramethyldisilazane