(2,3,3-Trifluoro-2-chlorocyclobutyl)trichlorosilane 770-95-6 EINECS 212-226-9 Silane, trichloro(2-chloro-2,3,3-trifluorocyclobutyl)- Trichloro(2-chloro-2,3,3-trifluorocyclobutyl)silane