1,5-Dichloro-1,1-diphenyl-3,3,5,5-tetramethyltrisilazane 64426-36-4 EINECS 264-892-5 N-(Chlorodimethylsilyl)-N'-(chlorodiphenylsilyl)-1,1-dimethylsilanediamine Silanediamine, N-(chlorodimethylsilyl)-N'-(chlorodiphenylsilyl)-1,1-dimethyl-