1,5-Dichloro-1-ethenyl-1,3,3,5,5-pentamethyltrisilazane 64426-38-6 EINECS 264-893-0 N-(Chlorodimethylsilyl)-N'-(chloromethylvinylsilyl)-1,1-dimethylsilanediamine Silanediamine, N-(chlorodimethylsilyl)-N'-(chloroethenylmethylsilyl)-1,1-dimethyl-