716593 -OEChem-02060822472D 5 4 0 0 0 0 0 0 0999 V2000 1.5105 1.7118 0.0000 Cl 0 0 0 0 0 0 0 0 0 0 0 0 1.5105 0.0000 0.0000 Cl 0 0 0 0 0 0 0 0 0 0 0 0 2.0139 0.8559 0.0000 Cl 0 0 0 0 0 0 0 0 0 0 0 0 1.0070 0.8559 0.0000 Si 0 0 0 0 0 0 0 0 0 0 0 0 0.0000 0.8559 0.0000 F 0 0 0 0 0 0 0 0 0 0 0 0 1 4 1 0 0 0 0 2 4 1 0 0 0 0 3 4 1 0 0 0 0 4 5 1 0 0 0 0 M END > 0 > 0 > 716593 > 3 > ChemIDplus > 014965527 > 14965-52-7 Trichlorofluorosilane > 14965-52-7 > 014965527 > http://chem.sis.nlm.nih.gov/chemidplus/ > http://chem.sis.nlm.nih.gov/chemidplus/direct.jsp?result=advanced®no=014965527 > 139862 1 $$$$